510 documents
- Hamideh Rostami, Jakey Blue, Claude Yugma. Automatic equipment fault fingerprint extraction for the fault diagnostic on the batch process data. Applied Soft Computing, 2017, 68, pp.972-989. ⟨10.1016/j.asoc.2017.10.029⟩. ⟨emse-01629337⟩
- Lars Monch, Chen-Fu Chien, Stéphane Dauzère-Pérès, Hans Ehm, John W. Fowler. Modelling and analysis of semiconductor supply chains. International Journal of Production Research, 2017, 56 (13), pp.4521-4523. ⟨emse-02023998⟩
- Rezvan Sadeghi. Consistency of global and local scheduling decisions in semiconductor manufacturing. Other. Université de Lyon, 2017. English. ⟨NNT : 2017LYSEM023⟩. ⟨tel-05578238⟩
- Juan Alejandro Sendon Perez. Risk minimization through metrology in semiconductor manufacturing. Other. Université de Lyon, 2017. English. ⟨NNT : 2017LYSEM022⟩. ⟨tel-02878704⟩
- Garima Singh, Julien Lozi, Nemanja Jovanovic, Olivier Guyon, Pierre Baudoz, et al.. A Demonstration of a Versatile Low-order Wavefront Sensor Tested on Multiple Coronographs. Publications of the Astronomical Society of the Pacific, 2017, 129 (979), pp.095002. ⟨10.1088/1538-3873/aa76c1⟩. ⟨obspm-02193041⟩
- Nabil Absi, Christian Artigues, Safia Kedad-Sidhoum, Sandra Ulrich Ngueveu, Omar Saadi. Lot-sizing models for energy management. International Workshop on Lot Sizing, Aug 2017, Glasgow, United Kingdom. ⟨hal-01880075⟩
- Raïssa Saleu, Laurent Deroussi, Dominique Feillet, Nathalie Grangeon, Alain Quilliot. Optimization of urban delivery systems with drones. VeRoLog (Annual Workshop of the EURO Working Group on Vehicle Routing and Logistics optimization), Jul 2017, Amsterdam, Netherlands. ⟨hal-02083195⟩
- Valeria Borodin, Faicel Hnaien, Alexandre Dolgui. Random lead times in replenishment planning for single-level assembly systems: The value of information. IFAC Wold Congress, Jul 2017, Toulouse, France. pp.1205 - 1210, ⟨10.1016/j.ifacol.2017.08.343⟩. ⟨hal-01687966⟩
- Alexandre Lima, Valeria Borodin, Stéphane Dauzère-Pérès, Philippe Vialletelle. A decision support system for managing line stops of time constraint tunnels: FA, IE. 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), May 2017, Saratoga Springs, United States. ⟨10.1109/ASMC.2017.7969250⟩. ⟨emse-01792272⟩
- Sophia Bourzgui, Agnès Roussy, Jakey Blue, Gaëlle Georges, Emilie Faivre, et al.. Embedded spectroscopic reflectometry metrology on FEOL silicon dioxide trench polishing equipment: ER: Equipement reliability and productivity enhancements. Advanced Semiconductor Manufacturing Conference (ASMC 2017 ), May 2017, Saratoga Springs, United States. ⟨10.1109/ASMC.2017.7969267⟩. ⟨hal-01622569⟩
