506 documents
- Hamideh Rostami, Jakey Blue, Claude Yugma. Equipment Condition Diagnosis and Fault Fingerprint Extraction in Semiconductor Manufacturing. IEEE International Conferenc on Machine Learning and Applications (ICMLA), Dec 2016, Anaheim, United States. ⟨emse-01621963⟩
- Yu-Ting Kao, Shi-Chung Chang, Jakey Blue, Stéphane Dauzère-Pérès. Generalized Overall Equipment Effectiveness for integrated scheduling and process control. 2016 International Symposium on Semiconductor Manufacturing (ISSM), Dec 2016, Tokyo, Japan. ⟨10.1109/ISSM.2016.7934514⟩. ⟨emse-01792276⟩
- Moulaye Aidara Ndiaye, Stéphane Dauzère-Pérès, Claude Yugma, Lionel Rulliere, Gilles Lamiable. Automated transportation of auxiliary resources in a semiconductor manufacturing facility. 2016 Winter Simulation Conference (WSC), Dec 2016, Washington, United States. ⟨10.1109/WSC.2016.7822297⟩. ⟨emse-01792262⟩
- Amelie Pianne, Luis Rivero, Stéphane Dauzère-Pérès, Philippe Vialletelle. Ideal and potential flexibility measures for qualification management in semiconductor manufacturing. 2016 Winter Simulation Conference (WSC), Dec 2016, Washington, United States. ⟨10.1109/WSC.2016.7822300⟩. ⟨emse-01792265⟩
- Stéphane Dauzère-Pérès, Michael Hassoun, Alejandro Sendon. Optimizing capacity assignment of multiple identical metrology tools. 2016 Winter Simulation Conference (WSC), Dec 2016, Washington, United States. ⟨10.1109/WSC.2016.7822308⟩. ⟨emse-01792257⟩
- Maria Mercedes Rizquez Moreno. Characterization and optimization of high density plasma etching processes for advanced memories application. Other. Université de Lyon, 2016. English. ⟨NNT : 2016LYSEM024⟩. ⟨tel-02918008⟩
- Sebastian Knopp. Complex Job-Shop Scheduling with Batching in Semiconductor Manufacturing. Other. Université de Lyon, 2016. English. ⟨NNT : 2016LYSEM014⟩. ⟨tel-01665198⟩
- Frantz Martinache, Nemanja Jovanovic, Olivier Guyon. Closed-loop focal plane wavefront control with the SCExAO instrument. Astronomy & Astrophysics - A&A, 2016, 593, pp.A33. ⟨10.1051/0004-6361/201628496⟩. ⟨hal-03518361⟩
- Hamideh Rostami, Jakey Blue, Claude Yugma. Equipment Anomaly Detection and Automatic Fault Fingerprint Extraction in Semiconductor Manufacturing. International Symposium on Semiconductor Manufacturing Intelligence (ISMI) , Aug 2016, Hsinchu, Taiwan. ⟨emse-01621968⟩
- Moulaye Aidara Ndiaye, Stéphane Dauzère-Pérès, Claude Yugma, Lionel Rulliere, Gilles Lamiable. Management of crisis situations in a large unified AMHS of a semiconductor manufacturing facility: IE: Industrial engineering. 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), May 2016, Saratoga Springs, United States. ⟨10.1109/ASMC.2016.7491112⟩. ⟨emse-01792280⟩
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