510 documents
- Sophia Bourzgui, Gaelle Georges, Agnès Roussy, Jakey Blue, Emilie Faivre, et al.. The light behavior from Shallow Trench Isolation profiles at Chemical Mechanical Planarization step and correlation with optical endpoint system by interferometry. Reflection, Scattering, and Diffraction from Surfaces VI, Aug 2018, San Diego, United States. pp.11, ⟨10.1117/12.2320966⟩. ⟨hal-02415466⟩
- Ahmed Senoussi, Stéphane Dauzère-Pérès, Nadjib Brahimi, Bernard Penz, Nadia Kinza Mouss. Heuristics Based on Genetic Algorithms for the Capacitated Multi Vehicle Production Distribution Problem. Computers and Operations Research, 2018, 96, pp.108 - 119. ⟨10.1016/j.cor.2018.04.010⟩. ⟨hal-01843926⟩
- Mehrdad Mohammadi, Stéphane Dauzere-Peres, Claude Yugma. Performance evaluation of single and multi-class production systems using an approximating queuing network. International Journal of Production Research, 2018, pp.1-27. ⟨10.1080/00207543.2018.1492163⟩. ⟨hal-02067294⟩
- Sandra Ulrich Ngueveu, Nabil Absi, Christian Artigues, Safia Kedad-Sidhoum, Félix Goupil. Decomposition method in a scheduling problem with energy storage and costs. International Symposium on Mathematical Programming - ISMP 2018, Jul 2018, Bordeaux, France. ⟨hal-02476464⟩
- Ali Ben-Salem. Aide à la décision pour l’automatisation de la manutention dans une unité de fabrication de semi-conducteurs. Autre. Université de Lyon, 2018. Français. ⟨NNT : 2018LYSEM010⟩. ⟨tel-02921455⟩
- Frans Snik, Olivier Absil, Pierre Baudoz, Brunella Carlomagno, Raphaël Galicher, et al.. Review of high-contrast imaging systems for current and future ground-based and space-based telescopes III: technology opportunities and pathways. Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation III, Jun 2018, Austin, France. pp.91, ⟨10.1117/12.2313957⟩. ⟨hal-02308225⟩
- Yu-Ting Kao, Stéphane Dauzère-Pérès, Jakey Blue, Shi-Chung Chang. Impact of integrating equipment health in production scheduling for semiconductor fabrication. Computers & Industrial Engineering, 2018, 120, pp.450 - 459. ⟨10.1016/j.cie.2018.04.053⟩. ⟨emse-01793390⟩
- Valeria Borodin, Hichem Snoussi, Faicel Hnaien, Nacima Labadie. Signal processing on graphs: Case of sampling in Paley-Wiener spaces. Signal Processing, 2018, 152, pp.130-140. ⟨10.1016/j.sigpro.2018.05.016⟩. ⟨emse-01797354⟩
- Aabir Chouichi, Jakey Blue, Claude Yugma, François Pasqualini. Heterogranular multivariate analytics for detecting and controlling the root causes of the mismatching machines in semiconductor manufacturing. 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), Apr 2018, Saratog, New York, United States. ⟨hal-02067516⟩
- Wei-Ting Yang, Jakey Blue, Agnès Roussy, Marco Reis, Jacques Pinaton. Advanced run-to-run controller in semiconductor manufacturing with real-time equipment condition. 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), Apr 2018, Saratoga Springs, United States. pp.346-352, ⟨10.1109/ASMC.2018.8373161⟩. ⟨emse-02499715⟩
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