Manufacturing Sciences and Logistics Department (SFL)

The SFL department was created in 2003 with the Center of Microelectronics of Provence. In 2017, more than 25 researchers were active in two main areas:

  • Manufacturing Sciences and Logistics for Microelectronics
    This area is mostly concerned with Semiconductor Manufacturing and is interested in Advanced Process Control and modeling and optimization at various decision levels.
  • Microelectronics for Manufacturing and Logistics
    This area studies the optimization of Freight and Passenger Transportation. Special focus is put on the new opportunities and challenges raised by the development of new communicating technologies.

In 2014, we joined the CNRS, within the Laboratoire d’Informatique, Modélisation et Optimisation des Systèmes (LIMOS, UMR 6158).

On this website, you’ll find detailed information about our projects, publications, main research interests, teachings and many other things that will give you a broad overview of our activity.

Latest News

  • 03/2018: Étienne Le Quere, the former ISMIN student (P2017) has been awarded the prize for the best internship of the IMT schools by the Mines-Telecom Foundation, BNP Paribas, Nokia & Orange. Please refer to the link to see his excellent work “Analysis and optimal control of the risk in manufacturing the silicon on isolator” at Soitec, supervised by SFL faculty Stéphane Dauzère-Pérès.
  • 02/2018: In the 19th ROADEF (Société Française de Recherche Opérationnelle et d’Aide à la Décision) in Lorient, SFL post-doc fellow, Hamza Ben Ticha, has won the best paper award of Transport and Logistics Working Group of the GDR-RO for his work on “Time-Dependent Vehicle Routing Problem with Time Windows and Road Network Information”.
  • 02/2018: In the 6th ISMI (International Symposium on Semiconductor Manufacturing Intelligence) in Hsinchu, Taiwan, SFL faculty, Jakey Blue, has won the outstanding presentation award for his talk on “Manifold Dimension Reduction of FDC Data as the Unsupervised Fault Diagnosis in Semiconductor Manufacturing”.
  • 02/2018: In the 6th ISMI (International Symposium on Semiconductor Manufacturing Intelligence) in Hsinchu, Taiwan, SFL faculty, Prof. Stéphane Dauzère-Pérès, is invited to give the keynote speech on ” Some Challenges on Integration of Decisions in Logistics”.
  • 02/2018: In the 6th ISMI (International Symposium on Semiconductor Manufacturing Intelligence) in Hsinchu, Taiwan, SFL Ph.D. candidate, Alexandre Lima, has won the best student paper award for his excellent work on “Joint Distribution Learning for Time Constraints Tunnels Management in Semiconductor Manufacturing”.
  • 01/2018: The 47th exchange day between STMicroelectronics (sites of Crolles and Rousset) and SFL Department was held on January 16 in Gardanne.

SFL in More Details

Manufacturing sciences and logistics for microelectronics

Since 2003, the EMSE has developed strong competencies in applied research on semiconductor manufacturing through various projects, in particular, the regional project “Rousset 2003-2008”, the MEDEA+ European Project HYMNE and more recently the ENIAC project IMPROVE. With partners such as STMicroelectronics (Crolles and Rousset), ATMEL, and AustriaMicroSystems, results and advances have been obtained in APC (R2R control, advanced statistical methods, virtual metrology), and fab management (capacity modelling, scheduling optimization, automated transportation). Many communications have been presented in well-known conferences in semiconductor manufacturing and scientific journals. The EMSE co-organized in 2011 and 2013 the International Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM).

Transportation and distribution: new technologies, new opportunities, new challenges

The development of new communicating technologies has a deep impact on the way transportation and distribution can be organized. Huge quantities of historical or real-time data can now be exploited to develop models with a better level of granularity, leading to transportation plans that are better optimized, more robust and more flexible.  We are interested in this issue in many different practical areas: city logistics, maritime transportation, railway transportation, intelligent transport systems, container and multimodal logistics, home service logistics. We address these challenges with operations research techniques and pursue both objectives of making strong academic contributions and of developing new models and methods in tight collaboration with industrial partners.


If you have any questions concerning the different perspectives in Department SFL, please feel free to contact the responsible persons below.


Dominique Feillet
Phone: +33 4 42 61 66 66


Michelle Gillet
Senior Secretary

Web Site

Jakey Blue
Associate Professor